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Information × Registration Number 0220U101982, 0116U005846 , R & D reports Title Study of the Processes in Proton Beam Lithography for Production of 3D structures for X-ray Optics Element Fabrication. popup.stage_title Head Ponomarev Alexander H., Доктор фізико-математичних наук Registration Date 28-02-2020 Organization Institute of Applied Physics, NAS of Ukraine popup.description2 Іon optics of the probe-forming system in the proton-beam writing channel and beam dynamic in scanning process were simulated. Тhe non-aberration raster of ion beam scanning is defined. A focused beam control system is developed in the scanning raster according to a given pattern. Experimental studies have been conducted in the proton-beam writing channel. Alignment of the channel is performed, samples are prepared, the procedure of their irradiation and processing is worked out in order to obtain primary small three-dimensional structures in resistive materials for fabrication of elements of x-ray optics. Product Description popup.authors Kozachok Olena V Kolinko Sergii V Ponomarev Oleksandr H. Rebrov Volodymyr A. Salyvon Vadym F popup.nrat_date 2020-04-02 Close