Search academic texts

Information × Registration Number 0221U000045, 0120U104716 , R & D reports Title Preparing design documentation for construction components of the non-balanced magnetron system units for a vacuum chamber VUP-5 popup.stage_title Head Kolomiiets Volodymyr M., Кандидат фізико-математичних наук Registration Date 02-01-2021 Organization Institute of Applied Physics National Academy of Sciences of Ukraine popup.description2 Sets of design documentation for the elements of the vacuum chamber VUP-5 were developed: the mechanism of the pumping speed regulator of the sputtering system vacuum chamber; device for protection of camera equipment from deposition at switching on of magnetron or cathode (target) and at several magnetrons switching on; the mechanism of automatic movement of the magnetron unbalancing magnet with the indicator of its position and the power supply unit.  Product Description popup.authors Ignatenko Sergey M. Pavlenko Yurii A. Samoilov Pavlo Ye Chuzhov Igor G. Shkurat Oleksandr I. popup.nrat_date 2021-01-02 Close