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Information × Registration Number 0221U106057, 0120U103199 , R & D reports Title Development of "smart" microelectronic sensor for controlling the contents of explosive and harmful gases in the air of living rooms popup.stage_title Head Lytovchenko Volodymyr H., Доктор фізико-математичних наук Registration Date 04-10-2021 Organization VE Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine popup.description2  Samples with a film of porous silicon on the surface of monocrystalline silicon of p- and n-types were made using the method of electrochemical dissolution. Microparticles of transition metals (Cu, Ni, Mo, W, etc.) were introduced into the silicon pores by the method of magnetron sputtering and subsequent heat treatments at a temperature of 450С - 600С. The sensitivity of these sensory structures (porSi / Ni and porSi / Mo) to carbon dioxide in the concentration range of 100-1000 ppm at room temperature in the air was studied. It is shown that these structures based on porous Si (j = 30 mA / cm2) with Ni and Mo nanoclusters show the largest response signal depending on the concentration of carbon dioxin in the air. Product Description popup.authors Gorbanyuk Tetyana Ivanivna Kurchak Anatolii Ivanovych Lytovchenko Volodymyr Grygopovych Musaev Sergii Musaevych Shugaeva Lyubov Mykhilivna popup.nrat_date 2021-10-04 Close