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Information × Registration Number 0222U003518, 0119U100510 , R & D reports Title Devices and equipment for the creation of protective multilayer coatings using additive technologies popup.stage_title Head Kolomiiets Volodymyr М., Кандидат фізико-математичних наукLopatkin Roman Yu., Кандидат фізико-математичних наук Registration Date 08-04-2022 Organization Institute of Applied Physics National Academy of Sciences of Ukraine popup.description2 A complete set of design documentation was carried out to develop magnetron with a target diameter of 60 mm with a mechanism for unbalancing its magnetic field which are based on the permanent magnets. A switching (frequency up to 100 kHz) power supply of 1 kW for magnetron sputtering of materials was developed. The VUP-5М technology of magnetron sputtering with high-power pulses (HiPIMS) for sputtering high-quality protective coatings has been mastered and successfully tested. A power supply for ion-beam etching of substrates in the atmosphere of argon has been developed. The Langmuire probe was created to investigate the parameters of the magnetron discharge and the electrical circuit of the probe power supply was developed. A quartz meter of thickness was developed and created to determine the thickness of the coating directly during its deposition. Product Description popup.authors Voznyi Vitalii I. Kanivecs Volodimyr M. Kononenko Iryna M Kravchenko Serhii M. Lufar Sergey І. Pavlenko Yurii A. Shkurat Oleksandr I. popup.nrat_date 2022-04-08 Close