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Information × Registration Number 0223U004872, 0123U102774 , R & D reports Title The modification of the surface of a solid body under the action of plasma and beams of charged particles. popup.stage_title Head Beresniev Viacheslav M., Доктор технічних наук Registration Date 06-12-2023 Organization V.N. Karazin Kharkiv National University popup.description2  The multi-component multilayer coatings TiSiN/NbN, (TiZrSiY)N/NbN formed by the method of vacuum-arc deposition with simultaneous sputtering of two cathodes of different composition have been obtained and investigated. The influence of the magnitude of the negative potential bias on the substrate and the pressure of the working gas in the chamber on the structural-phase composition, thermal, mechanical and adhesive characteristics of the coatings has been determined. It has been established that during the formation of TiSiN/NbN coatings, an increase in the negative potential bias from 100 V to 200 V at a working gas pressure of ~ 0.53 Pa leads to an increase in the parameters of the crystal lattices of TiN and δ-NbN, crystallite sizes and the level of microstresses, as well as to the formation predominant texture growth in the (200) plane. The TiN and NbN phases fixed in the (TiZrSiY)N/NbN coating are polycrystalline, the grain sizes can be compared with the layers. A columnar structure with a predominant (111) orientation is observed in the layers. It has been determined that the hardness and Young's modulus of the formed coatings depend on the thickness of the layers and reach indicators of Н = 39.7 GPa and Е = 438 GPa, respectively, in the coatings with the smallest thickness of the obtained layers. Product Description popup.authors Azarienkov Mykola O. Horokh Denys V Hrechko Yaroslav O Lisovskyi Valerii O. Lesnik Igor Stanislavovich Lytovchenko Serhii V. Mazilin Bohdan O Osmaev Ruslan Olegovich popup.nrat_date 2023-12-06 Close