Search academic texts

Information × Registration Number 0225U002908, (0120U102219) , R & D reports Title Methods of diagnostics of multilayer nanoscale structures using time-of-flight mass spectrometry popup.stage_title Розробка методики діагностики багатошарових нанорозмірних структур з використанням методу часопролітної мас-спектрометрії Head Romaniuk Borys M., д.ф.-м.н. Registration Date 16-04-2025 Organization V. Lashkaryov Institute of Semiconductor Physics of National Academy popup.description1 Development of a technique for diagnostics of impurity composition of nanocrystalline structures and processes of ion-stimulated transformation of interfacial boundaries in multilayer nanoscale structures using the time-of-flight mass spectrometry method, as well as changes of the isotopic composition of nanomaterials under the action of powerful energy beams. popup.description2 The elemental sensitivity coefficients in the analysis of layered structures by time-of-flight mass spectroscopy (TOF-SIMS) were determined using ZnO test samples with implanted rare-earth element impurities. Test samples were manufactured for mass spectrometer calibration by implanting relevant impurities into silicon wafers. A method for analyzing the interfaces of multilayer nanostructures AlGaN/GaN and Mo/Si after ion-beam modification and annealing, as well as after ion-stimulated mixing in Al/GaN structures during implantation of Ar+ and Kr+ ions to form light-emitting AlGaN/GaN heterostructures was developed. By analyzing the distribution of cluster ions, studies were conducted on the formation of silicide phases at the boundaries of metal nanoclusters on the silicon surface and the mechanisms of impurity accumulation at the boundaries of nanocrystals, as well as changes in the isotopic composition of nanostructured materials under the action of high-intensity ion beams. Product Description popup.authors Dubikovskyi Oleksandr V. Melnyk Viktor Р. Oberemok Oleksandr S. Romaniuk Borys M. Sabov Tomash M. Fedulov Viktor V. popup.nrat_date 2025-04-16 Close