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Information × Registration Number 0300U000274, 0199U003583 , R & D reports Title Developments of tehnology and novel vacuum equipments for vacuum oftaining of nanostructures popup.stage_title Розробка технологічної cхеми напилення та розробка cиcтеми іоннізації магнетронного джерела Head Krupa Mykola Mykolajovych, Registration Date 22-02-2000 Organization Institute of magnetism of NASU popup.description2 Blok- scheme and structural flowchart of automated vacuum nanostructure depostition system were developed. Main specifications for system units and blocks were formulated. Investigations of the effect of deposition process technological parameters and composition of nanodimensional amorphous and multilayered TbFeCo, CoAg and CoAl2O films on their magnetooptics were carried out. Scientific and technical report was prepared. Product Description popup.authors popup.nrat_date 2020-04-03 Close