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Information × Registration Number 0300U000828, 0100U003842 , R & D reports Title The development of technology and novel vacuum setting for vacuum obtaining of nanostructures popup.stage_title Розробка блок схеми, алгоритму роботи та блоку управління для вакуумної установки Head Likhoshva V.P., Registration Date 28-08-2000 Organization The Small State Industrial Innovation Venture "Plaser" popup.description2 It's development the schema of setting for syntax of many layers with optimize structure. Under the system development the electro-beem method and the magnetic spraying method are used. The setting is composed from such based systems as electro-beem spraying, magnetic spraying, vacuum, mas-spectrometer, working gas, heating and cooling Product Description popup.authors popup.nrat_date 2020-04-03 Close