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Information × Registration Number 0300U002164, 0198U005487 , R & D reports Title Mechanical properties of semiconductor structures and pressure sensors based on them popup.stage_title Виготовлення сенсорів з оптимізованими параметрами та вивчення їх характеристик у широкому діапазонів зовнішніх впливів Head Maronchuk Igor Yevgenovych, Registration Date 20-04-2000 Organization Kherson state technical university popup.description2 Objects of examination are the semiconductor epitaxial structures and pressure sensors based on them. The purpose of investigation is examination of micromechanical and physical properties of heterostructures of wide band gap A3B5 compounds and silicon and manufacturing of pressure sensors based on them. The installations for manufacturing semiconductor epilayers and low-dimension structures are made, pressure sensors are constructed and their performances are investigated as a result of examinations. Product Description popup.authors popup.nrat_date 2020-04-03 Close