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Information × Registration Number 0301U000365, 0195U024481 , R & D reports Title Development of not destroying methods control of the materials electron engineering based on the photoacoustic microcopу popup.stage_title Дослідження можливостей фотоакустичної та фотоелектричної мікроскопії для неруйнівної діагностики напівпровідників та напівпровідникових структур Head Kucherov Ivan Yakovych, Registration Date 21-02-2001 Organization Taras Shevchenko Kiev University popup.description2 Researches on phototermoacoustic (PTA) of a microscopy with piezoelectric by filing model is exemplar with semiconducting and piezoelectric of structures has shown, that PTA the microscopy can be used, as a no destroying method of diagnostics of such objects. Theoretically and experimentally is investigated PTA effect in piezoelectric the thin disk at it energization by pulse laser treatment. Is offered PTA a method of measurement of energy of pulse laser radiation. Product Description popup.authors popup.nrat_date 2020-04-02 Close