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Information × Registration Number 0302U005143, 0100U003304 , R & D reports Title Process investigation of plasma-chemical coating formation under exposure of condensation surface to charged particles popup.stage_title Накопичення експериментальних даних по впливу на кінетику плазмохімічного формування потоків заряджених часток різної енергії та густини Head Sagalovych V.V., Registration Date 25-03-2002 Organization Kharkov National University named after V.N.Karazin popup.description2 Subject of investigation: formation processes of stoichiometric composition attained by atomization of metal targets in mixtures of inert and reaction gases. Objectives: More detailed coverage of coat formation "metal-metalloid" of stoichiometric composition using the method of reactive magnetron sputtering. A theoretical investigation of interaction processes between reaction gas and target surface, and condensing surface under reactive magnetron sputtering of "metal-metalloid" coats was conducted. Analytical forms of dependences of corresponding composition coats formation on target atomization parameters and processes of plasmo-chemical formation of "metal-metalloid" compounds on the target surface. The results of the above investigations provide explanation of the previously experimentally proved fact of proximity or matching of the parameter area of reactive magnetron sputtering of stoichiometric coats with the process instability area of the target. Also, these data provide the basis for definition of these parameter areas and their dependence on both equipment characteristics (efficiency of pumping subsystem, general chamber surface and coat condensing surface, target surface etc.) and sputtering process parameters (values of working and reactive gas flows, and discharge current). Analysis of the experimental data on obtaining AlN, Al2o3, TiN, TiO2 coats of stoichiometric composition (or similar) have showed that irrespective of all differences in equipment and process parameters, the values of reaction gas pressure used for obtaining those coats vary within 1 order. The investigation results were used in definition of parameters for optimization of reactive magnetron sputtering processes to be implemented in technological developments and further investigations focused on obtaining coats with pre-defined properties. Product Description popup.authors popup.nrat_date 2020-04-02 Close