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Information × Registration Number 0302U005201, 0100U003301 , R & D reports Title Examination of requirements of forming charged particles streams of low and medial energies, methods of guidance of their parameters and interaction of synthesized streams with surfaces of solid bodies popup.stage_title Дослідження методу керування потоками іонів металу в умовах імпульсного випарювання, розрядних характеристик комбінованого магнетронного ВЧ-індукційного та тліючого розряду та ефектів зростання новоутворень Head Farenyk V.I., Registration Date 22-04-2002 Organization Kharkov National University named after V.N.Karazin popup.description2 Object of examination: gas discharges in constant and HF-electrical combined fields; low energy ion and electron streams, which can be used in vacuum-plasma technologies of a deposition of simple and synthesized coats; a surface of a solid body under activity low energy ion streams. The purpose of operation: examination of charged particles generation processes in combined magnetron — HF induction discharge; definition of guidance methods of charged and neutral particles streams in condition of a separate region of plasma oscillation and ion streams formation zone; examination of conception processes and growth of three-dimensional thin-film structures at interaction of synthesized streams with a surface of a solid body. Research methods: experimental examinations of the plasma discharge parameters of systems, parameters of plasma, energy distributions of ion and electron streams. As a result of realization of the first stage of work there was a created physical model of sputtering system on the basisof combined magnetron — HF induction discharge. It has allowed to reduce working pressure in a band of handling. Besides that, due to use of a magnetic field of a planar magnetron, it was possible to decrease necessary voltage value of a HF-field in 2 ...2,5 times, using the effect of a electron-cyclotron resonance, that considerably simplifies a construction of the technical device. The simple method of forming low energies ion streams in requirements of low pressure in a band of handling is offered. It happens at the expense of division of a oscillation zone and region of stream forming by vacuum resistance. The theoretical calculations of geometry of vacuum resistance are given. Is shown, that at magnification of pumping-out velocity has appeared the opportunity considerably to reduce working pressure. The density of ion current was supported at a level 20 mA/cm2. The appearance of growth the cone-shaped new structures is found. The mechanism which explains a nucleation and growth of such structures at theexpense of processes, which happen near the new structures and in area near cathode of the discharge is offered. Product Description popup.authors popup.nrat_date 2020-04-02 Close