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Head: Kidalov V.V.. Radical beam gettouny epitaxy a novel technique in the technology of semiconucte device structures based on multicomponent А3В5 compounds. (popup.stage: Технологічні аспекти радикало-променевої епітаксії гетеро структур на основі сполук А3В5). Ukrainian Research and Design Institute for Chemical Engineering Joint - stock company. № 0304U001667
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Updated: 2026-03-27
