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Information × Registration Number 0304U004153, 0103U004190 , R & D reports Title Theoretical and experimental research of processes plasmochemical formations of thin film materials with ionic conductivity popup.stage_title Експериментальні дослідження процесу плазмохімічного формування покриттів з іонною провідністю Head Sagalovich V.V., Registration Date 25-03-2004 Organization Kharkov National University named after V.N.Karazin popup.description2 Investigation subject: compounds with ionic conductivity and processes of plasmochemical plates formation under magnetron deposition. Objective: studying of plasmochemical formation conditions of the plate material with ionic conductivity. Investigation method: experimental determination parameters of formation different composition coatings under magnetron deposition. It was carried out zirconium property investigation as ionic conductor from the point of view of construction peculiarities of its lattice, diffusion processes and influence of impurities. It was shown the structure and thus and composition and so properties of plate materials from ZrO2 are under essential influence of formation and exploitation conditions. This makes possible to shift electro conductivity by several degrees by changing in right way plates deposition parameters and obtain high temperature phases under low temperatures. Modernization of VUP-5M apparatus makes possible to use it for realization of reactive magnetron deposition. Magnetron discharge become more stabile under conditions of high intensive microarc discharges on the target due to using of more powerful magnetron power supply. Working parameters for modernized VUP-5M were determined, which under reactive magnetron deposition of zirconium target in composition of inert gas Ar and reactive gas oxygen makes possible of ZrOx formation. The investigation results were used to determine optimization parameters of reactive magnetron plates deposition in technological researches and in further investigations aimed on obtaining coatings with predetermined properties. Expected investigation subject development: - processes optimization of obtaining coatings with predetermined properties. Product Description popup.authors popup.nrat_date 2020-04-02 Close