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Information × Registration Number 0304U004193, 0103U004209 , R & D reports Title Investigation of combined charged and neutral particles fluxes generation processes and control methods in ion-plasmous systems of low pressure popup.stage_title Дослідження комбінованого магнетронного — ВЧ індукційного розряду низького тиску, процесів формування компенсованих потоків іонів та модифікації поверхні катодів Head Farenik V.I., Registration Date 26-03-2004 Organization Kharkov National University named after V.N.Karazin popup.description2 The work is devoted to research of the unbalanced magnetron discharge, gas discharge with the hollow cathode, gas discharges in crossed constant electrical and magnetic fields and formation of the cathode surface relief in the magnetron discharge. The disharge parameters of ion source on the basis of the discharge with the hollow cathode and dependence of the excitation voltage of the hollow cathode from sorts of working gas and pressure in the working chamber are indicated. The characteristics of the unbalanced magnetron discharge are measured and the optimum conditions for receiving covers higher quality are determined. The conclusions about processes of the flow generation of the charged particles in conditions of low pressure and influence of a relief on the volt-ampere characteristic of the discharge are made. Product Description popup.authors popup.nrat_date 2020-04-02 Close