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Information × Registration Number 0305U001519, 0105U001168 , R & D reports Title Conducting of researches on development of method of forming of electronic bunch which expressly on the technological setting SBA-21 popup.stage_title Проведення досліджень по розробці способу формування гострофокусованого електронного пучка на технологічній установці ЦБА-21 Head Kovalenko Vladimir, Registration Date 05-03-2005 Organization The Third Kiev Branch of Joint-Stock Society "SCIENCE" popup.description2 Development is directed on development and support on modern high scientifically a technological level of one of the most important elements of microelectronic technology - lithographs with submicronic and nanometre distributive ability, and also creation of conditions for its subsequent application in manufacture of microelectronic devices of new generation. Development of technological methods of formation submicronic and nanometre structures will be carried out by improvement of methods of formation precisefocusedс electronic and ionic bunches, creation of programs of management by them, and also research of mechanisms of interaction of bunches with thin film metals, semiconductors and dielectric. Product Description popup.authors popup.nrat_date 2020-04-02 Close