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Information × Registration Number 0305U005226, 0105U005568 , R & D reports Title Reseach and development of highly efficient ionic sources on magnetron bit systems base. popup.stage_title Дослідження та розробка високоефективних іонних джерел на базі магнетронних розрядних систем Head Volodimir N. Groshev, Registration Date 05-08-2005 Organization Scientific-productive enterprise "Plasmotechnics" popup.description2 Research and development of highly effective ionic sources on magnetron bit systems base is conducted. It is developed and passed preliminary documentation of highly effective ionic source on reverse magnetron base, which is able to work in a vacuum chamber simultaneously with the process of electronic - radial evaporation of materials.5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close