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Information × Registration Number 0305U005997, 0104U009135 , R & D reports Title Investigation of doping process of silicon wafers and elaboration of solid planar sources popup.stage_title Дослідження дифузії легуючих елементів у кремній та виготовлення твердих планарних джерел. Виготовлення експериментальних зразків - твердих планарних джерел фосфору Head Ostrovskii Igor Petrovich, Registration Date 01-12-2005 Organization Lviv Polytechnic National University popup.description2 Peculiarities of solid planar sources (SPS) of boron and phosphor elaboration on thermostable substrates have been discussed. The main parameters of SPS were investigated: exploiment duration, doping properties. By use of experimental samples of boron and phosphor SPS an improvement of technological parameters of silicon wafer doping processes was achieved. Product Description popup.authors popup.nrat_date 2020-04-02 Close