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Information × Registration Number 0307U001336, 0107U000751 , R & D reports Title Development of microsystem technology and production of microelectronic test structures and microprofiled of silicon for sensitive elements electromechanical transducers popup.stage_title Розробка мікросистемної технології, виготовлення тестових мікроелектронних структур та мікропрофілювання кремнію для чутливих елементів електромеханічних перетворювачів Head Sharan Mikola Mikolaevich, Registration Date 16-02-2007 Organization "Polus" Radio and Electronics Reserch and development centre popup.description2 Topology of the test structures photo patterns and fabrication technology that includes protective composite films deposition have been worked out. The technological route has been conducted and the teststructures have been produced5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close