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Information × Registration Number 0307U001611, 0106U001949 , R & D reports Title The optimization of structure formation and properties of nanocrystalline multicomponent films at the ion-plasma sputtering. popup.stage_title Одержання покриттів методами іоноплазмового розпилення (ІПР). Head Bazhin Anatoliy Ivanovich, Registration Date 16-04-2007 Organization Donetsk National University popup.description2 The influence of regimes of ion-plasma sputtering (HF- power - P=200…600 W; the pressure of working gas - P0=0.75…0.32 Pa, the arrangement of substrate and target and other) on the thin structure parameters and deflection from film stoichiometry for system Ta-B; C60-Ti was studied by X-ray diffractometry, transmission electron microscopy and secondary ion mass spectrometry methods. The optimal regimes of sputtering, which allow to obtain nanocrystalline, uniform by the thickness films in system Ta-B, and structure close to stoichiometry are established. It is shown, that the increasing of HF-power reduces to increasing of texturing degree of films and size of substructure blocks. The annealing of films in system C60-Ti after deposition leads to new phase formation, which increase of corrosion properties significantly. Product Description popup.authors popup.nrat_date 2020-04-02 Close