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Information × Registration Number 0308U001206, 0107U000441 , R & D reports Title Simulation of mass transport processes during thin films deposition by energy particles popup.stage_title Розробка аналітичної моделі процесів масоперенесення при напилюванні тонких плівок пучками низькоенергетичних моноатомних частинок Head Kornich Grigoriy, Доктор фізико-математичних наук Registration Date 25-01-2008 Organization Zaporizhzhia National Technical University popup.description2 The purpose and subject of the work: development of analytical model and computer algorithms, which describe mass transport processes during thin film deposition by energetical particles; research of the influence of parameters of substrate bombardment on the evolution of concentration profiles of system components, which also influence on the film parameters. Research object – is the thin films deposition by energetical particles. Analytical diffusion model of the thin film deposition on a substrate with a glance of system components oxidation and data of concentration profiles evolution at varies model parameters have been obtained. Product Description popup.authors popup.nrat_date 2020-04-02 Close