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Information × Registration Number 0311U003306, 0110U006393 , R & D reports Title Development, synthesis and researches periodic heterostructures of sensors thermal popup.stage_title Розробка, синтез та дослідження періодичних гетероструктур теплових сенсорів. Head Priymak Vladimir, Registration Date 28-02-2011 Organization Сorporation Scientific production enterprise "Saturn" "Elisat" popup.description2 One-dimensional BaSrTi3 and BaTi3 structures formation technique by nanoimprint method was developed. A new way of creation of oxide monocrystal films by layer growth was developed. Its fundamental distinction from its known analogues consists in films growth from multiple oxide nanoparts which are formed in plasma of high-current high-frequency discharge (oxygen pressure is approximately 13 Pа and high-frequency capacity is 70-100 W/sm2). Ordered structures based on the films obtained by focus ionic etching with use of installation Quanta 3D (FEI Technology) was fabricated. Technological methodology of formation of nuclear bunches with the regulated parts speed was developed. Periodic structures on the basis of polar BaSrTi3 and BaTi3 dielectrics were obtained. The obtained physical constants that specify qualitative measures of these materials are: thermal diffusivity 2.3 10-3 sm2/s and 2.1 10-3 sm2/s (for both materials) and Curie-Weiss constant 3 103К and 2.4 103К accordingly. LiTa3 50-100 nm thickness nanolayers were obtained by molecular epitaxy at condensation speed 3-5 nm/min and with such parameters: stoichiometry is not worse then 15 % and polarisation is 3.2мcКl/sm2. It is shown, that the nanoimprint allows directly obtaining periodic structures of thermal sensor based on active dielectrics which are based on polymeric compounds and BаSrTi3 and BaTi3 sol-gel - layers. The laboratory heterostructure sample on ZnSe-PbTi3 materials on the silicon technological wafer basis in ultrahigh vacuum (not worse then 1 10-6Pа) was obtained. Product Description popup.authors Приймак Володимир Іванович popup.nrat_date 2020-04-02 Close