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Information × Registration Number 0313U005125, 0108U004840 , R & D reports Title Development and realization of the metrological complex for diagnostic of nanoelectronics component by scanning probe microscopy popup.stage_title Теоретичний аналіз фізичних процесів взаємодії нанозонд-поверхня при дослідженнях механічних та електрофізичних параметрів поверхонь методами СЗМ. Head Prokopenko Igor, Registration Date 30-04-2013 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 A software package for modeling and analysis of processes of mechanical and electrical interactions SPM probe with surface was develped. Using this software the unique method of mapping of the structural elements of the semiconductor nanoelectronic devices based on scanning probe microscope was created. Product Description popup.authors Литвин О.С. Литвин П.М. Прокопенко І.В. popup.nrat_date 2020-04-02 Close