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Information × Registration Number 0313U005126, 0108U004840 , R & D reports Title Development and realization of the metrological complex for diagnostic of nanoelectronics component by scanning probe microscopy popup.stage_title Розроблення і створення комплексу методів нанозондової діагностики локальних електричних параметрів елементів напівпровідникових наноструктур. Head Prokopenko Igor, Registration Date 30-04-2013 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 The method for complex diagnostic of the high-k dielectrics thin (5-20 nm) films for the needs of modern nanoelectronics was developed. Method consists of three diagnostic techniques: sub-nanometer surface topometry to detect fluctuations of thickness, characterization of local (contact area of 9 nm^2) leakage сurrent and control of mechanical properties by nanoindentation and nano-scratching. The above technique can significantly improve the quality of diagnosis of thin dielectric films, thereby increasing productivity and quality of manufactured products. Product Description popup.authors Литвин О.С. Литвин П.М. Прокопенко І.В. popup.nrat_date 2020-04-02 Close