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Information × Registration Number 0313U005127, 0108U004840 , R & D reports Title Development and realization of the metrological complex for diagnostic of nanoelectronics component by scanning probe microscopy popup.stage_title Розроблення і створення комплексу нанозондових методів діагностики локальних механічних параметрів наноматеріалів та структур на їх основі. Head Prokopenko Igor, Registration Date 30-04-2013 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 A systematic theoretical and experimental approach to the analysis of the mechanical and geometrical parameters of nanokapillar liquid bridges between AFM tip and solid surfece was developed using force-distance curves. A new method for diagnosing of a real surface local energy parameters was suggested using tips with different properties and topometrical and nanoindentation spatially coordinated measurements both in air and in liquid. Product Description popup.authors Литвин О.С. Литвин П.М. Прокопенко І.В. popup.nrat_date 2020-04-02 Close