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0410U006054,
к.т.н.
09-11-2010
o
Physical-chemical processes during manufacturing of big-size solar cells under the conditions of batch production
Marynenko Оleksandr,
popup.head Shmireva O.
popup.opponent Осінський Володимир Іванович
popup.opponent Голенков Олександр Генадійович
Дисертація присвячена комплексному дослідженню фізико-технологічних процесів виготовлення великогабаритних фотоелектричних перетворювачів (ФЕП) на базі кристалічного кремнію в умовах серійного виробництва. Проведено дослідження впливу на ефективність ФЕП: 1) параметрів вихідних кремнієвих пластин; 2) параметрів текстурованої поверхні (показано вплив параметрів текстурованої поверхні не тільки на щільність струму короткого замикання, а й на послідовний опір ФЕП); 3) режимів формування емітерного шару (встановлені значні відмінності від класичної теорії Фіка та залежність параметрів шарів від стану підготовки поверхні пластини, наведені рекомендації щодо режимів формування емітерного шару); 4) умов формування плівки АВП (для покращення стану приповерхневого шару запропоновано використання процесу обробки пластин в плазмі аміаку, що передує процесу осадження нітриду кремнію, для більш глибокого насичення кремнію атомами водню, що покращує пасивацію поверхні ФЕП). Наведено теоретичні та практичні результати дослідження механізму формування ізотипного переходу. Запропоновані фізико-технологічні процеси та засоби їх оптимізації дозволили отримати ККД для ФЕП площею 155…243 см.кв. на рівні: 17,4% для монокремнієвих ФЕП та 15,5% для мультикремнієвих ФЕП, що відповідає рівню кращих світових аналогів.
2010-11-09
2020-04-04
Updated: 2025-12-14
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