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Information × Registration Number 2111U000291, Article popup.category Стаття Title popup.author popup.publication 01-01-2011 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/22123 popup.publisher Видавництво СумДУ Description This paper presents the optimization in deflection caused by the inbuilt stress generated in mechanical or movable membrane of Symmetric Toggle RF MEMS Switch (STS). The movable membrane of STS was initially fabricated with two different materials, i.e. Chrome and Gold. The simulated deflection at 70°C was 11.9 μm, and experimental deflection was 11-12 μm. We present a study of inbuilt deflection reduction in multimetal movable layers without change in actuation voltage of the switch. The design study was initially carried out on cantilevers and then on structural membrane of STS. STS with proposed multilayer of Cr-Au-Au-Ti-Au has a simulated deflection of 0.56 μm at 70°C. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/22123 popup.nrat_date 2025-03-24 Close