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Information × Registration Number 2113U001692, Article popup.category Thesis Title popup.author popup.publication 01-01-2013 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/35167 popup.publisher Sumy State University Description Attestation of magnetron sputtered films as mass standards is presented. Homogeneous, long-lived metal films were measured by different methods for comparison. The accuracy of the order 1 ng was found to be provided by application of the metal film standards for element analysis by X-ray fluorescent method. Keywords: Thin Films, Nano-Standards, Magnetron Sputtering, X-ray Reflectometry, X-ray Fluorescent When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35167 popup.nrat_date 2025-05-12 Close