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Information × Registration Number 2114U000738, Article popup.category Стаття Title popup.author popup.publication 01-01-2014 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/36126 popup.publisher Sumy State University Description A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Pre-cision Machine Manufacturing” is described. Its assembly and working conditions are considered. This sys-tem was used for magnetron sputtering multilayer metallic films. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36126 popup.nrat_date 2025-03-24 Close