Registration Number
2116U006027, Article
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Книга
Title
Generation and transport of ion fluxes in the plasma systems with combined electric and magnetic fields (AI translated)
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Зиков О.В.
Zykov A.V.
Zykov O.V.
Zykov A.V.
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01-01-2016
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Харківський національний університет імені В. Н. Каразіна
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https://ekhnuir.karazin.ua/handle/123456789/14677
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Харків: ХНУ імені В. Н. Каразіна
Description
Zykov A.V. Generation and transport of ion fluxes in the plasma systems with combined electric and magnetic fields. – Manuscript.
Thesis for Doctor degree of Science in Physics and Mathematics in speciality 01.04.08 - Plasma Physics. - V.N. Karazin Kharkiv National University. - Kharkiv 2016.
The thesis is devoted to experimental and theoretical study of ion beams generation and transport in plasma systems with combined electric and magnetic fields, which are widely used in the surface engineering plasma technologies .
The ignition processes and integral characteristics of gas discharges are studied in devices with the combined electric (DC, radio-frequency, potential and vortex) and magnetic (DC, AC) fields on the base of planar magnetron discharge in the accelerating and plasma modes, inductively coupled discharge, combined inductivecapacity and inductive-magnetron discharges.
Analytical expressions for the ion energy cost and ionization coefficient for the electron group with different energy distribution function are derived and the three types of breakdown and ignition curves for direct-current gas discharge in the magnetic field have been obtained.
The change of equilibrium plasma electrons temperature in planar magnetron discharge have been established experimentally and theoretically , as a result of high-energy electrons group existence. The density of this electron group is depended from the discharge power and determines the current–voltage characteristics of discharge at low pressure of working gas.
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2026-04-13
