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R & D report
Theoretic basis of microelectromechanical systems, its production design and technology for flexible integrated manufacturing systems.
Head: Nevlyudov Igor Shackirovich. Theoretic basis of microelectromechanical systems, its production design and technology for flexible integrated manufacturing systems.. (popup.stage: ). Kharkiv National University of Radioelectronics. № 0211U008072
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Updated: 2026-10-27


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