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Information × Registration Number 0105U006577, R & D request Title Investigation and development of complex of precision local methods control of physical and chemical parameters semiconductor structures in manufacturing of high-reliability microelectronic devices. Head Попов Володимир Михайлович, Registration Date 11-10-2005 Organization State Scientific Institution “Institute for Single Crystals” of National Academy of Sciences of Ukraine popup.description1 popup.nrat_date 2024-12-11 Close