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Information × Registration Number 0114U001630, ( 0215U003793  ) R & D request Title Design and development of technologies for growing low-temperature nanostructured silicon compounds and nanocrystalline materials with a low coefficient of thermal expansion and the introduction of the production of microelectronic sensors, optical components for aerospace Instrumentation Head Маслов Володимир Петрович, Registration Date 26-03-2015 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Head: Маслов Володимир Петрович. Design and development of technologies for growing low-temperature nanostructured silicon compounds and nanocrystalline materials with a low coefficient of thermal expansion and the introduction of the production of microelectronic sensors, optical components for aerospace Instrumentation. V. Lashkaryov Institute of semiconductor physics. № 0114U001630
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Updated: 2026-03-21