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Information × Registration Number 0204U000009, 0103U002207 , R & D reports Title Development of high power pulse systems for sputtering of materials on the base of magnetron and arc units and their applying to technological processes for obtaining new thin and thick coatings popup.stage_title Head Anatoliy I. Kuzmichev, Registration Date 08-01-2004 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description2 Physical-technological and apparatus aspects of applying pulse sputtering systems to thin and thick coating technology are considered. The twin-magnetron systems with power supply from pulse modulators generating bipolar pulses in the current generator mode is shown to be advisable for using. The frequency-time parameters for the stable pulse deposition process are grounded. The mathematical model based on Monte Carlo approach for the sputtered species moving has been created. The model allows obtaining physically reliable results and detail information on particularities of mass transfer to the substrate in systems with one and two magnetrons. Calculation results may be used for choice of the optimal conditions for technological processes. Product Description popup.authors popup.nrat_date 2020-04-02 Close