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Total number
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0208U004851,
0108U010726
,
Nanocomposite thin films in metallization of semiconductor devices based on gallium nitride and silicon carbide for high - power electronics
Kuchuk Andrian Volodymyrovych,
23-12-2008
Institute of Semiconductor Physics of NAS of Ukraine
In the framework of the project the stable systems of contact metallization, based on ternary Ta(Ti)-Si-N diffusion barriers, to SiC and GaN were developed. The system of multilevel metallization contain the Au over-layer, diffusion barrier Ta(Ti)-Si-N (< 100 nm) and contact films of Au-, Pd- to GaN, and Ni-, Si- to SiC.
2020-04-03
Updated: 2025-12-08
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