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Information × Registration Number 0307U001773, 0106U001574 , R & D reports Title Research of processes of formation of streams of the activated particles inclaster plasma systems for synthesis and processing of nanostructure popup.stage_title Дослідження сумісних джерел активованих частинок у комбінованих та імпульсних Е-Н полях та еволюції рельєфу поверхні, що обробляється Head Farenik Volodimir Ivanovich, Registration Date 03-05-2007 Organization Kharkov national university named after V.N. Karazin popup.description2 Object of research - high-frequency the category of low pressure in the combined fields and interaction of streams of the activated particles with a surface of a firm body. The purpose of work - improvement of methods of diagnostics of plasma, an establishment of mechanisms of growth of new growths on a surface of a firm body under influence of streams of the activated particles of plasma. A method of research - the analysis of zonde characteristics of plasma, the theoretical description of formation of new growths. The experimental technique of minimization of a capacitive coupling of induction-coil with plasma which allows to exist to the induction category in the H-phase due to much smaller high-frequency power is offered. In work the model of the description which is based on the analysis of experimental data, origin and an initial stage of evolution of micron structures (new growths) on a surface of the cathode under action of a stream of plasma is developed. The equation of evolution of a structure of a surface which considers, alongside with dispersion, process of condensation on a surface of the secondary charged particles of own material of a target is received. The analytical decision of the given equation for entry conditions in the form of a cone is received. Product Description popup.authors popup.nrat_date 2020-04-02 Close