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Information × Registration Number 0109U000569, ( 0210U000738  ) R & D request Title The establishmenet of the correlation between film structure parameters and real growth surface temperature that appears during film deposition by magnetron sputtering Head Шагінян Леонід робертович, Registration Date 20-02-2009 Organization Institute for Problems in Materials Science popup.description1 popup.nrat_date 2024-12-10 Close
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The establishmenet of the correlation between film structure parameters and real growth surface temperature that appears during film deposition by magnetron sputtering
Head: Шагінян Леонід робертович. The establishmenet of the correlation between film structure parameters and real growth surface temperature that appears during film deposition by magnetron sputtering. Institute for Problems in Materials Science. № 0109U000569
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Updated: 2026-03-23


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