Registration Number
0203U008834,
0101U004340
, R & D reports
Title
Module setup for plasma-photostimulated deposition of films of superhard materials.
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Head
Litovchenko Volodymyr Grygorovych,
Registration Date
30-12-2003
Organization
V.Lashkaryov Institute of Semiconductor Physics National Academy of Sciences of Ukraine
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On the base of proposed design and scientific approaches an experimental sample of the setup was produced. The arrangement and test of the setup were performed. An experimental batch of DLC films was obtained. The effect of the deposition regimes on optical, mechanical, and emission properties of the films was studied to optimize the deposition regimes and investigate the mechanisms for the films formation.
Product Description
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2020-04-03
