Registration Number
0208U006920,
0107U008291
, R & D reports
Title
ZnMnO, GeMn and similar thin film materials and nanostructure for spintronic devices
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Head
Gorley Petro Mykolayovych,
Registration Date
24-12-2008
Organization
Yuri Fedkovych Chernivtsi National University
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We optimized the technology for radio-frequency magnetron sputtering to obtain high-quality films of non-doped and Co-doped zinc oxide films without pinholes, cracks, and featuring good adhesion to the substrate. We investigated the influence of target-substrate distance, magnetron power and chamber pressure on the film growth rate for magnetron deposited metal oxide films (ZnO and ZnO:Co). An empirical formula was proposed to describe the ZnO and ZnO:Co deposition rate as a function of chamber pressure under the constant magnetron power and substrate temperature. The obtained photoluminescence (PL) spectrum for ZnO correlates well with the literature data. We found that for the higher concentration of the doping impurity leads to insignificant shift of PL peaks for ZnO:Co films toward the lower energies.
Product Description
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2020-04-02
