Registration Number
0209U002670,
0107U006676
, R & D reports
Title
Microwave diagnostics and modifications of materials in nanotechnologies.
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Head
Gordiyenko Yuriy O.,
Registration Date
11-03-2009
Organization
Kharkov national university of radioelectronics
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As a result of project performance resonator microprobes the general electrodynamic theory microwave is developed for research of electrophysical properties of materials and structures. Optimisation of such microprobes behind criteria of the maximum sensitivity and spatial resolution is spent. Experimental samples new resonator microwave microprobes of a millimetric wave band with the improved metrological characteristics are created and investigated. It is created the experimental sample of a microwave microscope for multiparameter micro-diagnostics of physical properties and local updating of materials. New approaches of increase of resolution and multiparameter feature of microwave microscopy of semi-conductor structures are developed. Possibilities microwave of microupdating of semiconductors with use resonator microprobes are investigated.
Product Description
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2020-04-02
