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Information × Registration Number 0211U006133, 0109U001323 , R & D reports Title Research of processes of formation of streams of the activated particles inclaster plasma systems for synthesis and processing of nanostructure popup.stage_title Head Farenik Volodimir Ivanovich, Registration Date 22-02-2011 Organization Kharkov National University named after V.N. Karazin popup.description2 The object of research: a experimental sample of cluster ion-plasma system with parameters corresponding to requirements of industry. Objective: Development of new generation cluster ion plasma technological system for processing of complex (including nanocomposite) coatings and structures. Methods of research: Measurement of magnetron discharge parameters and energy analysis of charged particles flow. The report presents the results of design, development and technological approbation of experimental sample of cluster ion-plasma system designed for application in processing of complex (including nanocomposite) coatings and structures. The principal novelty of the cluster system is combination of multiple compatible sources of plasma, flows of metal atoms, ions, chemically active particles for sequential or simultaneous processing of complex micro-and nanostructures. All plasma modules can operate both separately and simultaneously during deposition of composite material coatings TiN, AlN, .ZrN, TiO2, Al2O3, ZrO2, and combinations consisting of multilayer structures and nanocomposites. Product Description popup.authors Дахов О. Дудін С. Зиков О. Лісовський В. Плетньов В. Рафальський Д. Фареник В. Харченко Н. Юнаков М. Яковін С. popup.nrat_date 2020-04-02 Close