Registration Number
0211U006133,
0109U001323
, R & D reports
Title
Research of processes of formation of streams of the activated particles inclaster plasma systems for synthesis and processing of nanostructure
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Head
Farenik Volodimir Ivanovich,
Registration Date
22-02-2011
Organization
Kharkov National University named after V.N. Karazin
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The object of research: a experimental sample of cluster ion-plasma system with parameters corresponding to requirements of industry. Objective: Development of new generation cluster ion plasma technological system for processing of complex (including nanocomposite) coatings and structures. Methods of research: Measurement of magnetron discharge parameters and energy analysis of charged particles flow. The report presents the results of design, development and technological approbation of experimental sample of cluster ion-plasma system designed for application in processing of complex (including nanocomposite) coatings and structures. The principal novelty of the cluster system is combination of multiple compatible sources of plasma, flows of metal atoms, ions, chemically active particles for sequential or simultaneous processing of complex micro-and nanostructures. All plasma modules can operate both separately and simultaneously during deposition of composite material coatings TiN, AlN, .ZrN, TiO2, Al2O3, ZrO2, and combinations consisting of multilayer structures and nanocomposites.
Product Description
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Дахов О.
Дудін С.
Зиков О.
Лісовський В.
Плетньов В.
Рафальський Д.
Фареник В.
Харченко Н.
Юнаков М.
Яковін С.
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2020-04-02
