Registration Number
0211U007963,
0110U002292
, R & D reports
Title
Investigation of low-pressure discharges for elaboration equipmant and technology for impulse electron-beam evaporation and ion-plasma deposition of nanostructure coatings
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Head
Denbnovetskiy Stanislav V.,
Registration Date
07-12-2011
Organization
Faculty of аircraft and space systems NTUU "KPI"
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The perspectives of using pulse electron-beam evaporation for deposition of compose nanostructurized coatings are substantiated. For forming of electron beam high voltage glow discharge electron sources are used, at that control of beam parameters is realized by using additional low-voltage discharges. Experimental investigation of technological processes of chemical compounds thermoion deposition by using pulse electron beam evaporation as well as ionizing of gas and vapor flux in the low-voltage discharges is provided. Particularities of technology of obtaining chemical compounds coatings by pulse thermoion deposition with using high voltage glow discharge electron sources are defined.
Product Description
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Крижановський Валерій Іванович
Кузьмичев Анатолій Іванович
Мельник Ігор Віталійович
Мельник Віталій Гнатович
Тугай Борис Андрійович
Тугай Сергій Борисович
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2020-04-02
