Registration Number
0214U008064,
0108U003194
, R & D reports
Title
Development and manufacturing of pulsed laser spectroscopy methods and equipment for control of atomic composition of materials and structures for nanoelectronics
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Head
Fedorenko Leonid, Tetyorkin Volodymyr,
Registration Date
27-06-2014
Organization
Institute of Semiconductor Physics of National Academy of Sciences of Ukrain
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The aim of this project is to develop methods and the creation of a prototype set of laser pulsed multichannel spectroscopy (LIMS) with the discrete step in the depth of the layer <10 nm, and the detection threshold 10 ppm (10-3%).LIMS system intended for diagnostic composition of submicron layers of solids (semiconductors, metals, nanostructures and composites) with nanometer spatial resolution to determine the profiles of atomic concentrations of the components of chemical elements (Si, Ge, SiC, Au, Ag, Cu, Al, and etc.) solids at submicron depths. Compared with existing counterparts, created in this complex research LIMS with N/N has a much higher resolution in comparable threshold detection h 10 nm at lower estimated cost. Developed in the project methodology LIMS determining the relative and absolute concentrations of Ni content of chemical elements in vyparovaniy fraction submicron surface layer of material has the following advantages: simultaneous registration of a large number of different elements, the relative low cost compared with existing prototype (SIMS, Auger spectroscopy, mass spectrometry, and others.) do not require prior special training samples and to speed elemental analysis of its components, and in comparison with existing analogs have a much higher resolution in depth, lack of demand for High-cells, low energy consumption, low demands on the spectral resolution recording system, the possibility of remote analysis of substances, a small amount of material required for analysis by a single laser pulse m<1 mg. The practical significance of the project is to develop methods express component analysis of semiconductors and other solids with high spatial resolution, which allows the use of the developed technique in semiconductor nanoelectronics. The results of research can be used in the following areas: electronic industry, geological exploration of mineral resources, the environment, science, and medicine. PULSED LASER SPECTROSCPY, SEMICONDUCTOR NANOELECTRONICS, SEMICONDUCTOR MATERIALS, COMPOSITION
Product Description
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Бекетов Г.В.
Ліннік Л.Ф
Наумов В.В.
Тетьоркін В.В.
Федоренко Л.Л.
Юсупов М.М.
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2020-04-02
