Registration Number
0214U008852,
0114U005243
, R & D reports
Title
Growing silicon nanowires by the CVD method and the determination of their geometrical parameters
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Head
Druzhinin Anatoliy Olexandrovych,
Registration Date
19-11-2014
Organization
Lviv Polytechnic National University
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Reviewed and analyzed the technological features of the method of chemical etching nonelectrolytic, which is suitable for the creation of ordered arrays of nanowires of silicon with the right size and density is shown that this method uses a two-dimensional pattern of the colloidal silica particles, onto which a layer of a noble metal that is a catalyst for the etching process.
Product Description
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Гарасим Ірина Данилівна
Дружинін Анатолій Олександрович
Корецький Роман Миколайович
Нічкало Степан Ігорович
Островський Ігор Петрович
Ховерко Юрій Миколайович
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2020-04-02
