Registration Number
0214U008998,
0110U004738
, R & D reports
Title
Development of the certificated mass-spectroscopy methods for nano-material, nano-srtuctures and amorphous alloy diagnostics
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Head
Romanyuk Borys Mikolayovich, Доктор фізико-математичних наук
Registration Date
22-12-2014
Organization
Institute of Semiconductor Physics of National Academy of Sciences of Ukrain
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The analysis of the factors that distort the distribution profiles of impurities in the measurement of nanoscale multilayer structures has been performed. The optimum parameters of sputtering for maximum resolution depth have been determined. The method of measurement the thickness distribution of element composition and thickness of the multilayer coatings by mass-spectrometry of secondary neutral particles has been developed. The method of measurement of the number of layers and thickness of the interface transition region in multilayer coatings AlGaN / GaN has been designed. The analysis of errors at the measurement of impurity concentration in nanometer periodic structures and layer thicknesses has been performed. Methods are attested by Ukrainian State Research and Production Center of Standardization, Metrology, Certification and Consumer Protection (DP Ukrmetrstandart).
Product Description
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Мельник В.П.
Мусаєв С.М.
Оберемок О.С.
Попов В.Г.
Романюк Б.М.
Хацевич І.М.
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2020-04-02
