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Registration Number

0215U000162, 0114U000771 , R & D reports

Title

Development and research of a new type of plasma source for uniform processing of large surfaces on the basis of the helicon discharge with a linear excitation system/

Head

Borysenko Anatolii Hryhorovych,

Registration Date

28-01-2015

Organization

Institute For Nuclear Research Of National Academy Of Sciences Of Ukraine

Description

A new type of the helicon discharge which is excited in magnetic field by means of the linear inductive antenna is investigated. The wave nature of the discharge is defined. Spatial distributions of high-frequency magnetic fields of excited waves are studied, basic parameters of created plasma and the ion energy distributions are defined. It is shown that there are discharge modes at which the plasma concentration is close to homogeneous along a considerable part of the antenna. The discharge configuration convenient for realization with the linear antenna immersed in plasma is proposed. The obtained data confirm that the given discharge system is capable to create plasma with high uniformity along the antenna and confirm perspectivity of further researches on possibility to use it for working out the new plasma-technological equipment for homogeneous processing of large surfaces.

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Бєлошенко Микита Анатолійович
Вірко Валерій Федорович
Вірко Юрій Валерійович
Слободян Вячеслав Михайлович