Registration Number
0217U006100,
0116U006714
, R & D reports
Title
Research of influence of technology factors on parameters of silicon nanowhiskers created by metal-assisted chemical etching
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Head
Druzhinin Anatoly Olexandrovych,
Registration Date
10-02-2017
Organization
Lviv Polytechnic National University
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The experimental results of silicon nanowhisker formation by MacEtch method are presented. The modified MacEtch method combined with a nanosphere lithography, is demonstrated for the production of Si nanowhisker arrays with various diameters. The results of surface examination of the silicon substrate by secondary ion mass spectroscopy are presented. The influence of the distance between nanowhiskers and the diameter on their photovoltaic characteristics is studied.
Product Description
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Гарасим Ірина Данилівна
Корецький Роман Миколайович
Нічкало Степан Ігорович
Островський Ігор Петрович
Ховерко Юрій Миколайович
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2020-04-02
