Registration Number
0218U001431,
0117U004855
, R & D reports
Title
The physical principles of ion-plasma synthesis and control of the properties of nanostructured complex-composite coatings
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Head
Lisovskiy Valeriy Oleksandrovych,
Registration Date
13-03-2018
Organization
Kharkov National University named after V.N. Karazin
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In this report, the study of the parameters of the synthesis of thin films of tantalum diboride, obtained in systems of RF and DC magnetron sputtering was carried out. A comparative analysis of the energy conditions for the synthesis of these films is made. It has been shown that depending on the method used to obtain a film (RF or DC), the quantity and energy of ions and neutral particles that are involved in film formation on the substrate surface significantly change, which leads to the formation of coatings in different structural states from the amorphous to nanocrystalline with a growth texture perpendicular to the plane (001).
Product Description
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В.О. Лісовський
М.М. Юнаков
О.В. Зиков
О.М. Дахов
С.В. Дудін
С.Д. Яковін
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2020-04-02
