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Information × Registration Number 0218U001431, 0117U004855 , R & D reports Title The physical principles of ion-plasma synthesis and control of the properties of nanostructured complex-composite coatings popup.stage_title Head Lisovskiy Valeriy Oleksandrovych, Registration Date 13-03-2018 Organization Kharkov National University named after V.N. Karazin popup.description2 In this report, the study of the parameters of the synthesis of thin films of tantalum diboride, obtained in systems of RF and DC magnetron sputtering was carried out. A comparative analysis of the energy conditions for the synthesis of these films is made. It has been shown that depending on the method used to obtain a film (RF or DC), the quantity and energy of ions and neutral particles that are involved in film formation on the substrate surface significantly change, which leads to the formation of coatings in different structural states from the amorphous to nanocrystalline with a growth texture perpendicular to the plane (001). Product Description popup.authors В.О. Лісовський М.М. Юнаков О.В. Зиков О.М. Дахов С.В. Дудін С.Д. Яковін popup.nrat_date 2020-04-02 Close